Submit manuscript...
MOJ
eISSN: 2576-4519

Applied Bionics and Biomechanics

Research Article Volume 10 Issue 1

Step piezoengine for nano and micro bionics

Afonin SM

National Research University of Electronic Technology, Russia

Correspondence: Afonin Sergey Mikhailovich, National Research University of Electronic Technology, MIET, 124498, Moscow, Russia

Received: February 27, 2026 | Published: March 13, 2026

Citation: Afonin SM. Step piezoengine for nano and micro bionics. MOJ App Bio Biomech. 2026;10(1):22-24. DOI: 10.15406/mojabb.2026.10.00238

Download PDF

Abstract

The parameters of the step piezoengine for nano and micro bionics, adaptive optics, laser systems, nanorobotics are obtained. The method mathematical physics are used. The transfer functions of the central piezoengine and piezolock are determined. The transfer functions for the step piezoengine for nano and micro bionics are investigated.

Keywords: step piezoengine, parameter, central piezoengine, piezolock, nano and micro bionics

Introduction

The step piezoengine is used for alignment and positioning in nano and micro bionics, adaptive optics, laser systems, nanorobotics. The step piezoengine is a piezomechanical device for converting electrical energy into mechanical energy and for actuating mechanisms and systems based on the piezoeffect1–15 in the nanometer-to-millimeter range. Increasing the travel range to millimeters with the positioning error on the order of the nanometer is achieved by using the step piezoengine with the multilayer central piezoengine and piezolocks made of PZT ceramics.16–27

Method

The parameters of the step piezoengine are obtained by method mathematical physics with using the equation the inverse piezoeffect and the ordinary second-order differential equation.

The transverse inverse piezoeffect1–12 is written as

S 1 = d 31 E 3 + s 11 E T 1 MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGtbWaaSbaaSqaaiaabgdaaeqaaOGaeyypa0JaamizaSWa aSbaaeaacaqGZaGaaeymaaqabaGaaGPaVRGaamyraSWaaSbaaeaaca qGZaaabeaakiabgUcaRiaadohalmaaDaaabaGaaeymaiaabgdaaeaa caWGfbaaaOGaamivaSWaaSbaaeaacaqGXaaabeaaaaa@4AD0@ ,

and longitudinal inverse piezoeffect - as

S 3 = d 33 E 3 + s 33 E T 3 MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGtbWaaSbaaSqaaiaabodaaeqaaOGaeyypa0JaamizaSWa aSbaaeaacaqGZaGaae4maaqabaGaaGPaVRGaamyraSWaaSbaaeaaca qGZaaabeaakiabgUcaRiaadohalmaaDaaabaGaae4maiaabodaaeaa caWGfbaaaOGaamivaSWaaSbaaeaacaqGZaaabeaaaaa@4ADA@ ,

 

where S 1 , S 3 , d 31 , d 33 , E 3 , s 11 E , s 33 E , T 1 , T 3 MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGtbWaaSbaaSqaaiaabgdaaeqaaOGaaiilaiaaykW7caWG tbWaaSbaaSqaaiaabodaaeqaaOGaaiilaiaaykW7caWGKbWcdaWgaa qaaiaabodacaqGXaaabeaakiaacYcacaaMc8UaamizaSWaaSbaaeaa caqGZaGaae4maaqabaGccaGGSaGaaGPaVlaadweadaWgaaWcbaGaae 4maaqabaGccaGGSaGaaGPaVlaadohadaqhaaWcbaGaaeymaiaabgda aeaacaWGfbaaaOGaaiilaiaaykW7caWGZbWaa0baaSqaaiaabodaca qGZaaabaGaamyraaaakiaacYcacaaMc8UaamivamaaBaaaleaacaqG XaaabeaakiaacYcacaaMc8UaamivamaaBaaaleaacaqGZaaabeaaaa a@62AE@ are the relative deformation along axes 1 and 3, the transverse and longitudinal piezomodules, the electric field strength along axes 3, the elastic compliances at the transverse and longitudinal piezoeffect and the mechanical stress along axes 1 and 3, then the equation for the inverse piezoeffect has the general form1–12

S i = d mi E m + s ij E T j MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGtbWaaSbaaSqaaiaadMgaaeqaaOGaeyypa0JaamizaSWa aSbaaeaacaWGTbGaamyAaaqabaGaaGPaVRGaamyraSWaaSbaaeaaca WGTbaabeaakiabgUcaRiaadohalmaaDaaabaGaamyAaiaadQgaaeaa caWGfbaaaOGaamivaSWaaSbaaeaacaWGQbaabeaaaaa@4C6C@ ,

where S i MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGtbWcdaWgaaqaaiaadMgaaeqaaaaa@3E34@ , d mi MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGKbWcdaWgaaqaaiaad2gacaWGPbaabeaaaaa@3F37@ , E m MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGfbWcdaWgaaqaaiaad2gaaeqaaaaa@3E2A@ , s ij E MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGZbWcdaqhaaqaaiaadMgacaWGQbaabaGaamyraaaaaaa@400E@ , T j MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGubWcdaWgaaqaaiaadQgaaeqaaaaa@3E36@  are the relative deformation, the piezomodule, the electric field strength, the elastic compliance at E=const MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGfbGaeyypa0Jaae4yaiaab+gacaqGUbGaae4Caiaabsha aaa@42C8@ , the mechanical stress, and the indexes i, j = 1, 2, … , 6; m = 1, 2, 3, … ,.6.

The ordinary second-order differential equation for central piezoengine and the piezolock has the form12−15

d 2 Ξ( x,s ) d x 2 γ 2 Ξ( x,s )=0 MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaadaWcaaqaaiaabsgadaahaaWcbeqaaiaabkdaaaGccqqHEoaw daqadaqaaiaadIhacaGGSaGaam4CaaGaayjkaiaawMcaaaqaaiaabs gacaWG4bWaaWbaaSqabeaacaqGYaaaaaaakiabgkHiTiabeo7aNTWa aWbaaeqabaGaaeOmaaaakiabf65aynaabmaabaGaamiEaiaacYcaca WGZbaacaGLOaGaayzkaaGaeyypa0Jaaeimaaaa@5192@ ,

where Ξ( x,s ) MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacqqHEoawdaqadaqaaiaadIhacaGGSaGaam4CaaGaayjkaiaa wMcaaaaa@41F4@ , x MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWG4baaaa@3D3F@ , s MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGZbaaaa@3D3A@ , γ MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacqaHZoWzaaa@3DE9@  are the Laplace transform of the displacement, the coordinate, the transformation operator, the propagation coefficient.

Parameters of central piezoengine and piezolock

The expression for the Laplace transform of the relative deformation under the elastic inertial load has the form at x=0 MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWG4bGaeyypa0Jaaeimaaaa@3EF8@ , Ξ 1 ( s )=Ξ( 0,s )=0 MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacqqHEoawdaWgaaWcbaGaaeymaaqabaGcdaqadaqaaiaadoha aiaawIcacaGLPaaacqGH9aqpcqqHEoawdaqadaqaaiaabcdacaGGSa Gaam4CaaGaayjkaiaawMcaaiabg2da9iaabcdaaaa@4958@  and at x=l MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWG4bGaeyypa0JaamiBaaaa@3F36@ , Ξ 2 ( s )=Ξ( l,s ) MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacqqHEoawdaWgaaWcbaGaaeOmaaqabaGcdaqadaqaaiaadoha aiaawIcacaGLPaaacqGH9aqpcqqHEoawdaqadaqaaiaadYgacaGGSa Gaam4CaaGaayjkaiaawMcaaaaa@47DE@ , we have at the one fixed end the solution of the ordinary differential equation of the piezoengine in the form

Ξ( x,s )= Ξ 2 ( s )sh( xγ )/ sh( lγ ) MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacqqHEoawdaqadaqaaiaadIhacaGGSaGaam4CaaGaayjkaiaa wMcaaiabg2da9maalyaabaGaeuONdG1aaSbaaSqaaiaabkdaaOqaba WaaeWaaeaacaWGZbaacaGLOaGaayzkaaGaaGPaVlaabohacaqGObWa aeWaaeaacaWG4bGaeq4SdCgacaGLOaGaayzkaaaabaGaae4CaiaabI gadaqadaqaaiaadYgacqaHZoWzaiaawIcacaGLPaaaaaaaaa@559B@ ,

where l MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGSbaaaa@3D33@ is the length of the piezoengine.

The expression for the Laplace transform of the relative deformation under the elastic inertial load at x=l MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWG4bGaeyypa0JaamiBaaaa@3F36@ has the form

dΞ( x,s )/ dx | x=l = d mi E m ( s ) s ij E M p 2 Ξ 2 ( s )/ S 0 s ij E C e Ξ 2 ( s )/ S 0 , MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaadaabcaqaamaalyaabaGaaeizaiabf65aynaabmaabaGaamiE aiaacYcacaWGZbaacaGLOaGaayzkaaaabaGaaeizaiaadIhaaaaaca GLiWoadaWgaaqaaiaadIhacqGH9aqpcaWGSbaabeaacqGH9aqpcaWG KbWcdaWgaaqaaiaad2gacaWGPbaabeaacaaMc8UccaWGfbWaaSbaaS qaaiaad2gaaOqabaWaaeWaaeaacaWGZbaacaGLOaGaayzkaaGaeyOe I0YaaSGbaeaacaWGZbWcdaqhaaqaaiaadMgacaWGQbaabaGaamyraa aakiaad2eacaaMb8UaamiCaSWaaWbaaeqabaGaaeOmaaaakiabf65a yTWaaSbaaeaacaqGYaaabeaakmaabmaabaGaam4CaaGaayjkaiaawM caaaqaaiaadofalmaaBaaabaGaaeimaaqabaaaaOGaeyOeI0YaaSGb aeaacaWGZbWcdaqhaaqaaiaadMgacaWGQbaabaGaamyraaaacaaMc8 UccaWGdbWcdaWgaaqaaiaadwgaaeqaaOGaeuONdG1cdaWgaaqaaiaa bkdaaeqaaOWaaeWaaeaacaWGZbaacaGLOaGaayzkaaaabaGaam4uaS WaaSbaaeaacaqGWaaabeaaaaGccaGGSaaaaa@72F7@

where M, C e , S 0 MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGnbGaaiilaiaaykW7caaMc8Uaam4qamaaBaaaleaacaWG LbaabeaakiaacYcacaaMc8UaaGPaVlaadofadaWgaaWcbaGaaeimaa qabaaaaa@483F@ are the mass and the stiffness of the load, the cross-sectional area of the piezoengine.

Therefore, we have the expression in the form

Ξ 2 ( s )γcth( lγ )+ Ξ 2 ( s ) s ij E M s 2 / S 0 + Ξ 2 ( s ) s ij E C e / S 0 = d mi E m ( s ). MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacqqHEoawdaWgaaWcbaGaaeOmaaGcbeaadaqadaqaaiaadoha aiaawIcacaGLPaaacqaHZoWzcaqGJbGaaeiDaiaabIgadaqadaqaai aadYgacqaHZoWzaiaawIcacaGLPaaacqGHRaWkdaWcgaqaaiabf65a ynaaBaaaleaacaqGYaaakeqaamaabmaabaGaam4CaaGaayjkaiaawM caaiaadohalmaaDaaabaGaamyAaiaadQgaaeaacaWGfbaaaOGaamyt aiaaygW7caWGZbWcdaahaaqabeaacaqGYaaaaaGcbaGaam4uaSWaaS baaeaacaqGWaaabeaaaaGccqGHRaWkdaWcgaqaaiabf65ayTWaaSba aeaacaqGYaaabeaakmaabmaabaGaam4CaaGaayjkaiaawMcaaiaado halmaaDaaabaGaamyAaiaadQgaaeaacaWGfbaaaOGaam4qaSWaaSba aeaacaWGLbaabeaaaOqaaiaadofalmaaBaaabaGaaeimaaqabaaaaO Gaeyypa0JaamizaSWaaSbaaeaacaWGTbGaamyAaaqabaGccaWGfbWa aSbaaSqaaiaad2gaaOqabaWaaeWaaeaacaWGZbaacaGLOaGaayzkaa GaaiOlaaaa@7012@

Then the transfer function of the piezoengine with distributed parameters has the form

W U ( s )= Ξ 2 ( s ) U( s ) = d mi l/δ M s 2 / C p +lγcth( lγ )+ C e / C p MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGxbWaaSbaaSqaaiaadwfaaeqaaOWaaeWaaeaacaWGZbaa caGLOaGaayzkaaGaeyypa0ZaaSaaaeaacqqHEoawlmaaBaaabaGaae OmaaqabaGcdaqadaqaaiaadohaaiaawIcacaGLPaaaaeaacaWGvbWa aeWaaeaacaWGZbaacaGLOaGaayzkaaaaaiabg2da9maalaaabaWaaS GbaeaacaWGKbWaaSbaaSqaaiaad2gacaWGPbaakeqaaiaadYgaaeaa cqaH0oazaaaabaWaaSGbaeaacaWGnbGaam4CaSWaaWbaaeqabaGaae OmaaaaaOqaaiaadoeadaWgaaWcbaGaamiCaaqabaaaaOGaey4kaSIa amiBaiabeo7aNjaabogacaqG0bGaaeiAamaabmaabaGaamiBaiabeo 7aNbGaayjkaiaawMcaaiabgUcaRmaalyaabaGaam4qaSWaaSbaaeaa caWGLbaabeaaaOqaaiaadoeadaWgaaWcbaGaamiCaaqabaaaaaaaaa a@64BC@ ,

where C p = S 0 s ij E l MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGdbWaaSbaaSqaaiaadchaaeqaaOGaeyypa0ZaaSaaaeaa caWGtbWaaSbaaSqaaiaabcdaaeqaaaGcbaGaam4CamaaDaaaleaaca WGPbGaamOAaaqaaiaadweaaaGccaWGSbaaaaaa@45D3@ , δ MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacqaH0oazaaa@3DE7@ , l=nδ MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGSbGaeyypa0JaamOBaiaaykW7cqaH0oazaaa@425C@ , n MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGUbaaaa@3D35@ are the stiffness of the piezoengine, the thickness of the piezolayer, the length of the piezoengine and the number of the piezolayers in the piezoengine.

The transfer function on the electric field strength for the multilayer longitudinal piezoengne for the central piezoengne or the piezolock of the step piezoengne in Figure 1 has the form

W E (s)= Ξ 2 ( s ) E m ( s ) = d 33 nδ M s 2 / C p +lγcth( lγ )+ C e / C p . MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGxbWaaSbaaSqaaiaadweaaeqaaOGaaGPaVlaacIcacaWG ZbGaaiykaiabg2da9maalaaabaGaeuONdG1cdaWgaaqaaiaabkdaae qaaOWaaeWaaeaacaWGZbaacaGLOaGaayzkaaaabaGaamyramaaBaaa leaacaWGTbaabeaakmaabmaabaGaam4CaaGaayjkaiaawMcaaaaacq GH9aqpdaWcaaqaaiaadsgadaWgaaWcbaGaae4maiaabodaaOqabaGa amOBaiabes7aKbqaamaalyaabaGaamytaiaadohalmaaCaaabeqaai aabkdaaaaakeaacaWGdbWaaSbaaSqaaiaadchaaeqaaaaakiabgUca RiaadYgacqaHZoWzcaqGJbGaaeiDaiaabIgadaqadaqaaiaadYgacq aHZoWzaiaawIcacaGLPaaacqGHRaWkdaWcgaqaaiaadoealmaaBaaa baGaamyzaaqabaaakeaacaWGdbWaaSbaaSqaaiaadchaaeqaaaaaaa GccaGGUaaaaa@6753@

Then the transfer functionon the voltage for the multilayer longitudinal piezoengine with distributed parameters has the form

W U ( s )= Ξ 2 ( s ) U( s ) = d 33 n M s 2 / C p +lγcth( lγ )+ C e / C p . MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGxbWaaSbaaSqaaiaadwfaaeqaaOWaaeWaaeaacaWGZbaa caGLOaGaayzkaaGaeyypa0ZaaSaaaeaacqqHEoawlmaaBaaabaGaae OmaaqabaGcdaqadaqaaiaadohaaiaawIcacaGLPaaaaeaacaWGvbWa aeWaaeaacaWGZbaacaGLOaGaayzkaaaaaiabg2da9maalaaabaGaam izamaaBaaaleaacaqGZaGaae4maaqabaGccaWGUbaabaWaaSGbaeaa caWGnbGaam4CaSWaaWbaaeqabaGaaeOmaaaaaOqaaiaadoeadaWgaa WcbaGaamiCaaqabaaaaOGaey4kaSIaamiBaiabeo7aNjaabogacaqG 0bGaaeiAamaabmaabaGaamiBaiabeo7aNbGaayjkaiaawMcaaiabgU caRmaalyaabaGaam4qaSWaaSbaaeaacaWGLbaabeaaaOqaaiaadoea daWgaaWcbaGaamiCaaqabaaaaaaakiaac6caaaa@634B@

The transfer function on the electric field strength for the multilayer longitudinal piezoengne for the central piezoengne or the piezolock of the step piezoengne in Figure 1 has the form.

Figure 1 Step piezoengine: 1 – central piezoengine; 2 – piezolock.

Therefore, we obtain the steady state displacement of the free end of the multilayer central piezoengne in the form

ξ 2 ( )= d 33 n U 0 1+ C e / C p = k U U 0 MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacqaH+oaEdaWgaaWcbaGaaeOmaaqabaGcdaqadaqaaiabg6Hi LcGaayjkaiaawMcaaiabg2da9maalaaabaGaamizamaaBaaaleaaca qGZaGaae4maaqabaGccaWGUbGaamyvamaaBaaaleaacaaIWaaabeaa aOqaaiaabgdacqGHRaWkdaWcgaqaaiaadoealmaaBaaabaGaamyzaa qabaaakeaacaWGdbWaaSbaaSqaaiaadchaaeqaaaaaaaGccqGH9aqp caWGRbWaaSbaaSqaaiaadwfaaeqaaOGaamyvamaaBaaaleaacaqGWa aabeaaaaa@528E@ ,

where k U = d 33 n 1+ C e / C p MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGRbWaaSbaaSqaaiaadwfaaeqaaOGaeyypa0ZaaSaaaeaa caWGKbWaaSbaaSqaaiaabodacaqGZaaabeaakiaad6gaaeaacaqGXa Gaey4kaSYaaSGbaeaacaWGdbWcdaWgaaqaaiaadwgaaeqaaaGcbaGa am4qamaaBaaaleaacaWGWbaabeaaaaaaaaaa@4853@ is the transmission coefficient on the voltage, t MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWG0bGaeyOKH4QaeyOhIukaaa@4099@ is the time, and U 0 MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGvbWaaSbaaSqaaiaabcdaaeqaaaaa@3DFB@ is the voltage amplitude.

For the piezoelectric actuator made of PZT ceramics with the elastic inertial load at d 33 MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGKbWaaSraaSqaaiaabodacaqGZaaabeaaaaa@3EC4@ ;= 0.4 nm/V, n MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGUbaaaa@3D35@ = 8, C p MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGdbWaaSbaaSqaaiaadchaaeqaaaaa@3E2B@ = 2×107 N/m, C e MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGdbWaaSbaaSqaaiaadwgaaeqaaaaa@3E20@ = 0.5×107 N/m, U 0 MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGvbWaaSbaaSqaaiaabcdaaeqaaaaa@3DFB@ = 100 V we obtain the transfer coefficient k U MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGRbWaaSbaaSqaaiaadwfaaeqaaaaa@3E38@ = 2.56 nm/V and the steady state value ξ 2 ( ) MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacqaH+oaEdaWgaaWcbaGaaeOmaaqabaGcdaqadaqaaiabg6Hi LcGaayjkaiaawMcaaaaa@41EA@ = 256 nm with the error 10 %.

Then, the transfer function W U ( s ) MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGxbWaaSbaaSqaaiaadwfaaeqaaOWaaeWaaeaacaWGZbaa caGLOaGaayzkaaaaaa@40AF@ of the multilayer central piezoengne with the lumped parameters at the low matching circuit resistance R0 MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGsbGaeyOKH4Qaaeimaaaa@3FB9@ and the elastic inertial load has the form

W U ( s )= Ξ 2 ( s ) U( s ) = d 33 n ( 1+ C e / C p )( T t 2 s 2 +2 T t ξ t s+1 ) MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGxbWaaSbaaSqaaiaadwfaaeqaaOWaaeWaaeaacaWGZbaa caGLOaGaayzkaaGaeyypa0ZaaSaaaeaacqqHEoawlmaaBaaabaGaae OmaaqabaGcdaqadaqaaiaadohaaiaawIcacaGLPaaaaeaacaWGvbWa aeWaaeaacaWGZbaacaGLOaGaayzkaaaaaiabg2da9maalaaabaGaam izamaaBaaaleaacaqGZaGaae4maaqabaGccaWGUbaabaWaaeWaaeaa caqGXaGaey4kaSYaaSGbaeaacaWGdbWcdaWgaaqaaiaadwgaaeqaaa GcbaGaam4qamaaBaaaleaacaWGWbaabeaaaaaakiaawIcacaGLPaaa daqadaqaaiaadsfadaqhaaWcbaGaamiDaaqaaiaabkdaaaGccaWGZb WaaWbaaSqabeaacaqGYaaaaOGaey4kaSIaaeOmaiaadsfadaWgaaWc baGaamiDaaqabaGccqaH+oaEdaWgaaWcbaGaamiDaaqabaGccaWGZb Gaey4kaSIaaeymaaGaayjkaiaawMcaaaaaaaa@64FE@ ,

W U ( s )= k U T t 2 s 2 +2 T t ξ t s+1 MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGxbWaaSbaaSqaaiaadwfaaeqaaOWaaeWaaeaacaWGZbaa caGLOaGaayzkaaGaeyypa0ZaaSaaaeaacaWGRbWaaSbaaSqaaiaadw faaeqaaaGcbaGaamivamaaDaaaleaacaWG0baabaGaaeOmaaaakiaa dohadaahaaWcbeqaaiaabkdaaaGccqGHRaWkcaqGYaGaamivamaaBa aaleaacaWG0baabeaakiabe67a4naaBaaaleaacaWG0baabeaakiaa dohacqGHRaWkcaqGXaaaaaaa@5186@ ,

where T t = M C e + C p MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGubWaaSbaaSqaaiaadshaaeqaaOGaeyypa0ZaaOaaaeaa daWcaaqaaiaad2eaaeaacaWGdbWaaSbaaSqaaiaadwgaaeqaaOGaey 4kaSIaam4qamaaBaaaleaacaWGWbaabeaaaaaabeaaaaa@44F5@ is the time constant for the oscillatory link.

For the PZT ceramic multilayer central piezoengne with the lumped parameters at the elastic inertial load C p MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGdbWaaSbaaSqaaiaadchaaeqaaaaa@3E2B@ = 2×107 N/m, C e MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGdbWaaSbaaSqaaiaadwgaaeqaaaaa@3E20@ = 0.5×107 N/m and M MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGnbaaaa@3D14@ = 1 kg we have the const time T t MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGubWaaSbaaSqaaiaadshaaeqaaaaa@3E40@ = 0.2×10-3 s with the error 10 %.

Taking into account the capacitance  of the multilayer central piezoengne and the high resistance R>>0 MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGsbGaeyOpa4JaeyOpa4Jaaeimaaaa@3FDC@ of the matching circuit we have the time constant for the aperiodic link T a =R C n MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGubWaaSbaaSqaaiaadggaaeqaaOGaeyypa0JaamOuaiaa doeadaWgaaWcbaGaamOBaaqabaaaaa@41FB@ ,

where

W U ( s )= Ξ 2 ( s ) U( s ) = k U T a s+1 MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGxbWaaSbaaSqaaiaadwfaaeqaaOWaaeWaaeaacaWGZbaa caGLOaGaayzkaaGaeyypa0ZaaSaaaeaacqqHEoawdaWgaaWcbaGaae OmaaqabaGcdaqadaqaaiaadohaaiaawIcacaGLPaaaaeaacaWGvbWa aeWaaeaacaWGZbaacaGLOaGaayzkaaaaaiabg2da9maalaaabaGaam 4AamaaBaaaleaacaWGvbaabeaaaOqaaiaadsfadaWgaaWcbaGaamyy aaqabaGccaWGZbGaey4kaSIaaeymaaaaaaa@51A9@

,

at T a >> T t MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGubWaaSbaaSqaaiaadggaaeqaaOGaeyOpa4JaeyOpa4Ja amivamaaBaaaleaacaWG0baabeaaaaa@4245@ .

For the PZT ceramic multilayer longitudinal central piezoengne at R MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGsbaaaa@3D19@ = 20 kΩ, C n MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGdbWaaSbaaSqaaiaad6gaaeqaaaaa@3E29@ = 1 μF we have the const time for the aperiodic link T a MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGubWaaSbaaSqaaiaadggaaeqaaaaa@3E2D@ = 20×10-3 s with the error 10 % and T a / T t =10 MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGubWaaSbaaSqaaiaadggaaeqaaOGaai4laiaadsfadaWg aaWcbaGaamiDaaqabaGccqGH9aqpcaqGXaGaaeimaaaa@435F@ .

Displacement for step piezoengine

The amplitude step β MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacqaHYoGyaaa@3DE3@ of the step piezoengine is written as

β= n d 33 U 0 1+ C e / C p = k U U 0 MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacqaHYoGycqGH9aqpdaWcaaqaaiaad6gacaWGKbWaaSbaaSqa aiaabodacaqGZaaabeaakiaadwfadaWgaaWcbaGaaeimaaqabaaake aacaqGXaGaey4kaSYaaSGbaeaacaWGdbWcdaWgaaqaaiaadwgaaeqa aaGcbaGaam4qamaaBaaaleaacaWGWbaabeaaaaaaaOGaeyypa0Jaam 4AamaaBaaaleaacaWGvbaabeaakiaadwfadaWgaaWcbaGaaeimaaqa baaaaa@4E80@ .

Let us consider the time diagrams of the operation of the step piezoengne on Figure 2 and Figure 3, where T MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGubaaaa@3D1B@ , T 1 MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGubWaaSbaaSqaaiaabgdaaeqaaaaa@3DFB@ , t MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWG0baaaa@3D3B@ , τ MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacqaHepaDaaa@3E07@ are the period of the clocking pulses, the duration of the pulse, the time from the start of the movement and the time in the current step.

Figure 2 Time diagram step piezoengine in oscillatory mode.

Figure 3 Time diagram step piezoengine in aperiodic mode.

 

For the central piezoengine in the oscillatory link mode at R0 MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGsbGaeyOKH4Qaaeimaaaa@3FB9@ the displacement of the step piezoengine on k step Figure 2 is given as

ξ( τ )=β{ k1+( 1 e ξ t τ T t 1 ξ t 2 sin( ω t τ+ ϕ t ) ) }. MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacqaH+oaEdaqadaqaaiabes8a0bGaayjkaiaawMcaaiabg2da 9iabek7aInaacmaabaGaam4AaiabgkHiTiaabgdacqGHRaWkdaqade qaaiaabgdacqGHsisldaWcaaqaaiaadwgadaahaaqabeaacqGHsisl daWcaaqaaiabe67a4naaBaaaleaacaWG0baakeqaaiabes8a0bqaai aadsfadaWgaaWcbaGaamiDaaGcbeaaaaaaaaqaamaakaaabaGaaeym aiabgkHiTiabe67a4TWaa0baaeaacaWG0baabaGaaeOmaaaaaOqaba aaaiaabohacaqGPbGaaeOBamaabmaabaGaeqyYdC3cdaWgaaqaaiaa dshaaeqaaOGaeqiXdqNaey4kaSIaeqy1dy2cdaWgaaqaaiaadshaae qaaaGccaGLOaGaayzkaaaacaGLOaGaayzkaaaacaGL7bGaayzFaaGa aiOlaaaa@68A2@

For the central piezoengine in the oscillatory link mode at R>>0 MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaacaWGsbGaeyOpa4JaeyOpa4Jaaeimaaaa@3FDC@ the displacement of the step piezoengine on k step Figure 3 is written as

ξ( τ )=β{ k1+( 1 e τ/ T a ) } MathType@MTEF@5@5@+= feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn hiov2DGi1BTfMBaeXatLxBI9gBaerbujxzIv3yOvgDG00uaerbd9wD YLwzYbItLDharqqtubsr4rNCHbGeaGqkY=MjYJH8sqFD0xXdHaVhbb f9v8qqaqFr0xc9pk0xbba9q8WqFfea0=yr0RYxir=Jbba9q8aq0=yq =He9q8qqQ8frFve9Fve9Ff0dmeaabaqaciGacaGaaeaadaabaeaafa aakeaajugGbiabe67a4PWaaeWaaeaacqaHepaDaiaawIcacaGLPaaa cqGH9aqpcqaHYoGydaGadaqaaiaadUgacqGHsislcaqGXaGaey4kaS YaaeWaaeaacaqGXaGaeyOeI0IaamyzamaaCaaaleqabaGaeyOeI0Ya aSGbaOqaaiabes8a0bWcbaGccaWGubWcdaWgaaqaaKqzGeGaamyyaa WcbeaaaaaaaaGccaGLOaGaayzkaaaacaGL7bGaayzFaaaaaa@544E@ .

Therefore, we have the parameters of the step piezoengine for nano and micro bionics.

Results

We begin by making the assumption that the weights (wi; i=1,…,N) of individual fish are exchangeable for all values of N. This assumption means in particular that the joint predictive distribution of the weights, describing beliefs about the weights of the fish in the sample, is always the same regardless which particular N fish would have been sampled, and how they would be ordered within the sample. According to the celebrated representation theorem of de Finetti, the assumption of exchangeability allows us to write the joint predictive distribution (density) in the form

Conclusion

The step piezoengine is used for alignment and positioning in nano and micro bionics, for adaptive optics and laser systems. Increasing the displasement range to millimeters with the positioning error on the order of the nanometer is achieved. The step piezoengine with the multilayer central piezoengine and piezolocks made of PZT ceramics and used due to its high rigidity and nano precision. The parameters of the step piezoengine for nano and micro bionics are determined. The transfer functions of the central piezoengine and piezolock are derived.

Acknowledgments

None.

Funding

None.

Conflicts of interest

The author declares that there is no conflict of interest.

References

  1. Schultz J, Ueda J, Asada H. Cellular actuators. Butterworth-Heinemann Publisher, Oxford. 2017;382.
  2. Afonin SM. Absolute stability conditions for a system controlling the deformation of an elecromagnetoelastic transduser. Dokl Math. 2006;74(3):943–948.
  3. Uchino K. Piezoelectric actuator and ultrasonic motors. Boston, MA: Kluwer Academic Publisher. 1997;8:350.
  4. Sun P, Xu Z, Jin L, et al. A novel piezo inertia actuator utilizing the transverse motion of two parallel leaf-springs. Micromachines (Basel). 2023;14(5):954.
  5. Afonin SM. Solution of the wave equation for the control of an elecromagnetoelastic transduser. Dokl Math. 2006;73(2):307–313.
  6. Afonin SM. Erratum to: Solution of the wave equation for the control of an elecromagnetoelastic transduser. Dokl Math. 2025;111:91.
  7. Cady WG. Piezoelectricity: An introduction to the theory and applications of electromechancial phenomena in crystals. McGraw-Hill Book Company, New York, London, 1946;806.
  8. Mason W, editor. Physical acoustics: Principles and methods. 1. Part A. Methods and devices. Academic Press, New York, 1964;515.
  9. Zhao C, Li Z, Xu F, et al. Design of a novel three-degree-of-freedom piezoelectric-driven micro-positioning platform with compact structure. Actuators. 2024;13(7):248.
  10. Zwillinger D. Handbook of differential equations. Academic Press, Boston, 1989;673.
  11. Afonin SM. Structural-parametric model and transfer functions of electroelastic actuator for nano- and microdisplacement. Chapter 9 in Piezoelectrics and Nanomaterials: Fundamentals, Developments and Applications. Ed. Parinov IA. Nova Science, New York. 2015;225–242.
  12. Afonin SM. Structural scheme of electroelastic engine micro and nano displacement for applied bionics and biomechanics. MOJ App Bio Biomech. 2025;9(1):1–4.
  13. Chang Q, Chen W, Zhang S, et al. Review on multiple-degree-of-freedom cross-scale piezoelectric actuation technology. Adv Intell Syst. 2024;6(6):2300780.
  14. Afonin SM. Structural-parametric model of electromagnetoelastic actuator for nanomechanics. Actuators. 2018;7(1):6.
  15. Afonin SM. Structural-parametric model and diagram of a multilayer electromagnetoelastic actuator for nanomechanics. Actuators. 2019;8(3):52.
  16. Afonin SM. Optimal control of a multilayer electroelastic engine with a longitudinal piezoeffect for nanomechatronics systems. Appl Syst Innov. 2020;3(4):53.
  17. Afonin SM. Coded сontrol of a sectional electroelastic engine for nanomechatronics systems. Appl Syst Innov. 2021;4(3):47.
  18. Afonin SM. Structural–parametric model electroelastic actuator nano- and microdisplacement of mechatronics systems for nanotechnology and ecology research. MOJ Eco Environ Sci. 2018;3(5):306‒309.
  19. Afonin SM. Deformation of electromagnetoelastic actuator for nano robotics system. Int Rob Auto J. 2020;6(2):84–86.
  20. Afonin SM. Piezo actuators for nanomedicine research. MOJ App Bio Biomech. 2019;3(2):56–57.
  21. Afonin SM. Structural scheme of electromagnetoelastic actuator for nano biomechanics. MOJ App Bio Biomech. 2021;5(2):36–39.
  22. Afonin SM. DAC electro elastic engine for nanomedicine. MOJ App Bio Biomech. 2024;8(1):38–40.
  23. Afonin SM. Multilayer and sectional nano piezo engine for applied bionics and biomechanics. MOJ App Bio Biomech. 2025;9(1):59–62.
  24. Shevtsov SN, Soloviev AN, Parinov IA, et al. Piezoelectric actuators and generators for energy harvesting. Research and Development. Springer, Switzerland, Cham. 2018;182.
  25. Akpinar M, Uzun B, Yayli MO. Dynamics of a piezoelectric restrained nanowire in an elactic matrix. Mech Solids. 2024;59(5): 2936–2959.
  26. Nalwa HS, editor. Encyclopedia of nanoscience and nanotechnology. USA: American Scientific Publishers. 25 Volumes. 2019.
  27. Afonin SM. Structural-parametric model of a piezoactuator for nanoscience and nanotechnology. Eur J Appl Sci. 2021;9(3):26–36.
Creative Commons Attribution License

©2026 Afonin. This is an open access article distributed under the terms of the, which permits unrestricted use, distribution, and build upon your work non-commercially.